1180 Series Diamond Like Coating Equipment

Number

Parameter Item

Date

1

Number of installable targets

Up to 6 universal interfaces can be configured,

The number of planar targets and ion sources can be configured as required

2

Effective coating area

Diameter 780mm~920mm optional, foundation height 700mm,

Other heights are available on demand, up to 2000 mm

3

Rotary table bearing

800kg (basic model), up to 1500kg

4

Maximum heating temperature

350°C

5

Coating cycle

8-16 hours/furnace

6

Technical characteristics

1.Unbalanced Closed Magnetically Controlled Cathode Technology (UBM)

2. Intelligent baffle (SS)

3. Anode layer ion source

7

Scope of application

The coatings that the 1180 series coating equipment can handle, such as DLC, GLC, WC/C, sputtering CrN, and combinations of all these coatings.