Analysis on Air Leakage Inspection of Hard Coating Equipment

Checking the air leakage is a checking method to ensure the vacuum degree of hard coating equipment, which is called leak detection for short. The concavity and convexity of the vacuum degree directly affect the role of the coating, so leak detection is essential.

Generally, air leakage in the vacuum chamber occurs from some small holes on the chamber wall or from the joint slot in front of the components. When the air extraction system is used to extract air, the pressure in the vacuum chamber decreases. The difference between the external and internal pressure makes the gas flow from the outside with high pressure to the vacuum chamber with low pressure, forming a reduced vacuum. In the process of leak detection, we need to pay attention to some problems in order to do a good job of leak detection.

1、 Check whether the leakage is real or virtual, because the workpiece data will generate gas to different degrees after heating, which may be mistaken for the gas flowing from the outside, which is called virtual leakage, and this situation should be eliminated.

2、 Test the gas sealing function of the vacuum chamber to ensure that the gas sealing function meets the requirements.

3、 Check the size, shape, orientation and leakage speed of the leakage hole to prepare a solution plan and implement it.

4、 Determine the leak detectability and leak detection sensitivity of the inspection instrument, so as to detect the gas leakage on a large scale, prevent some leaks from being overlooked, and improve the accuracy of leak detection.

5、 Grasp the reaction time and elimination time of the leak detection instrument, and make sure that the leak detection instrument is in place. If the time is short, the leak detection function will be poor, and the time will be long, wasting the leak detection gas and labor electricity cost.

6、 It is also necessary to prevent the leak from blocking. Sometimes, due to operational errors, the leak is blocked by some dust or liquid during the leak detection process, thinking that there is no leak in this direction. However, when these obstructions do not block the leak due to the difference between internal and external pressure or other reasons, the leak still exists. It is very important to do a good job of leak detection for hard coating equipment. There are many reasons for vacuum reduction. We should solve these reasons one by one to stabilize the role of coating.