1. Vacuum equipment is used to eliminate the influence of atmosphere on sample purity during the experiment.
2. The experimental operators shall not carry electronic products during operation.
3. The experimental operators shall wear special operating gloves for vacuum equipment and shall not directly touch the vacuum equipment.
4. The vacuum equipment accessories shall be stored in the drying box and kept away from corrosive chemical gases or liquids.
5. Vacuum equipment shall be wiped regularly, and clean with dust-free paper or cloth matched with alcohol or acetone.
6. The laboratory should maintain a certain degree of dryness, and the test operators should check the humidity and temperature of the laboratory every day.
7. The laboratory shall be well ventilated to avoid the impact of mechanical pump oil and gas.
8. If oil pump is used for the front pump of vacuum equipment, the desiccant and engine oil shall be replaced regularly.
9. The operator shall pay attention to the temperature of the molecular pump used by the vacuum equipment, so as to avoid shortening the service life of the instrument due to overheating.
10. The operator shall put nitrogen or liquid nitrogen into the molecular pump after the speed drops below the safety line.
11. The operator shall pay close attention to the loss degree of the power interface of the high-pressure ion pump to prevent the operator from electric shock and ensure safety.
12. The operator shall ensure that the vacuum degree reaches 1 × Start the ion pump above 10-8mbar.
13. When operating, the tester should strictly follow the operating steps of each vacuum equipment to open and close the valve, so as to prevent backpumping caused by air pressure difference.
14. When the alarm bell rings, do not carry out the experiment again, and immediately notify the person in charge of the laboratory and the maintenance personnel for inspection.
15. In case of special circumstances, immediately notify all the people present to leave quickly and cut off the power supply of the vacuum equipment.
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